Determination of the emission characteristics of evaporation sources and of the thickness and composition of mixed layers

被引：13
|
作者：
Podolesheva, I [1 ]
Gushterova, P [1 ]
Platikanova, V [1 ]
Konstantinov, I [1 ]
机构：
[1] Bulgarian Acad Sci, Cent Lab Photog Proc, BG-1040 Sofia, Bulgaria
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1998年 / 16卷 / 02期
关键词：
D O I：
10.1116/1.581086
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Methods are developed for determining the emission characteristics of enclosed evaporation sources with small apertures and for calculating the composition and thickness of mixed layers by controlling the condensation rates with quartz crystal monitors. For describing the emission characteristics of the sources the cos(n) law is used and a method for determining n is presented. A procedure for calculating the composition and thickness of mixed layers at each point of stationary substrates by measuring the condensation rates is described and the calculated characteristics of the layers are experimentally confirmed by means of analytical, electron dispersive spectroscopy and profilometrical analyses. The procedure is quits simple and does not require knowing the temperature dependence of the vapor pressure of the evaporated substances. It can be used for characterizing all layers obtained by evaporation from one or more sources as well as for selecting the experimental conditions for obtaining layers of desired composition and thickness. (C) 1998 American Vacuum Society.
引用
收藏
页码：674 / 678
页数：5
相关论文
共 50 条
  • [31] Directional Emission from Metal Dielectric Metal Structures: Effect of Mixed Metal Layers, Dye Location, and Dielectric Thickness
    Choudhury, Sharmistha Dutta
    Badugu, Ramachandram
    Ray, Krishanu
    Lakowicz, Joseph R.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2015, 119 (06): : 3302 - 3311
  • [32] Conductive layers thickness determination by surface resistance measurements
    Voiron, F
    Federspiel, X
    Ignat, M
    COMPTES RENDUS DE L ACADEMIE DES SCIENCES SERIE II FASCICULE B-MECANIQUE PHYSIQUE ASTRONOMIE, 1999, 327 (11): : 1197 - 1200
  • [33] Visual determination of thickness and porosity of porous silicon layers
    Lazarouk, S
    Jaguiro, P
    Katsouba, S
    Maiello, G
    LaMonica, S
    Masini, G
    Proverbio, E
    Ferrari, A
    THIN SOLID FILMS, 1997, 297 (1-2) : 97 - 101
  • [34] DETERMINATION OF THICKNESS AND COMPOSITION OF ADSORPTION LAYERS, BASED ON THE GIBBS-BOGOLYUBOV VARIATION PRINCIPLE FOR THE LAMINATED VOLUME MODEL
    MAGALINSKII, VB
    ZHURNAL FIZICHESKOI KHIMII, 1981, 55 (10): : 2710 - 2713
  • [35] Determination of the Phase Composition and the Thickness of Thin Layers with the Aid of X-ray Quantitative Phase Analysis.
    Cermak, Miroslav
    Kovove Materialy, 1982, 20 (01): : 111 - 119
  • [36] EVAPORATION CHARACTERISTICS OF DROPLETS COATED WITH IMMISCIBLE LAYERS OF NONVOLATILE LIQUIDS
    RAY, AK
    DEVAKOTTAI, B
    SOUYRI, A
    HUCKABY, JL
    LANGMUIR, 1991, 7 (03) : 525 - 531
  • [37] FORMATION OF EMISSION LINES IN GASEOUS LAYERS OF FINITE OPTICAL THICKNESS
    PECKER, JC
    ANNALES D ASTROPHYSIQUE, 1968, 31 (05): : 537 - &
  • [38] Determination of Al composition in strained AlGaN layers
    Zhou, SQ
    Wu, MF
    Yao, SD
    CHINESE PHYSICS LETTERS, 2005, 22 (12) : 3189 - 3191
  • [39] Thickness and composition of ultrathin SiO2 layers on Si
    van der Marel, C
    Verheijen, MA
    Tamminga, Y
    Pijnenburg, RHW
    Tombros, N
    Cubaynes, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04): : 1572 - 1578
  • [40] ACCURATELY DETERMINING THE COMPOSITION AND THICKNESS OF LAYERS IN A GAAS/INGAAS SUPERLATTICE
    JONES, KA
    COLE, MW
    COOKE, P
    FLEMISH, JR
    PFEFFER, RL
    SHEN, H
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) : 1609 - 1614
12345