Shape measurement by grating projection and whole-space tabulation method

被引：0
|
作者：
Morimoto, Yoshiharu [1 ]
Fujigaki, Motoharu [2 ]
Masaya, Akihiro [2 ]
机构：
[1] Wakayama Univ, Wakayama 6408510, Japan
[2] Wakayama Univ, Dept Opto Mechatron, Wakayama 6408510, Japan
来源：
ISOT: 2009 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES | 2009年
关键词：
component; shape measurement; whole-space tabulation method; calibration; phase analysis; high-speed; accurate; PROFILOMETRY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The authors previously proposed a shape measurement method using pixel-by-pixel calibration tables produced with multiple reference planes. In this method, all the relationships between the phase of the projected grating and the spatial coordinates can be obtained for each pixel. This method is called 'whole-space tabulation method'. This method excludes a lens distortion and intensity errors of the projected grating in measurement results theoretically. Tabulation makes a highspeed and accurate shape measurement possible. The principle of the shape measurement using the whole-space tabulation method and some results of shape measurements using this method are shown.
引用
收藏
页码：418 / +
页数：2
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