Accuracy Improvement of Shape Measurement Using Whole-Space Tabulation Method

High-speed and accurate shape measurement method is required in many industrial areas. We proposed a shape measurement method using pixel-by-pixel calibration tables produced with multiple reference planes. In this method, all the relationships between the phase of the projected grating and the spatial coordinates can be obtained for each pixel. We call it "whole-space tabulation method". This method excludes a lens distortion and the intensity warping of the projected grating in measurement results theoretically. Tabulation makes high-speed measurement possible. A highspeed and accurate shape measurement system can be possible to develop easily using this method. Random noise occurring in an imaging device and optical setup, however, causes error in this method. In this paper, accuracy improvement methods and the effectiveness for shape measurement using the whole-space tabulation method are shown.