Effects of O2 gas addition on Diamond-like Carbon film deposition

被引：0
|
作者：
Nakamura, N [1 ]
Itani, T [1 ]
Chiba, H [1 ]
Watanabe, K [1 ]
Kurihara, K [1 ]
机构：
[1] Fujitsu Labs Ltd, Inorgan Mat & Polymers Lab, Atsugi, Kanagawa 2430197, Japan
来源：
AMORPHOUS AND NANOSTRUCTURED CARBON | 2000年 / 593卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The role of O-2 gas addition on the deposition of Diamond-like Carbon (DLC) film was studied for hard disk drive (HDD) media application. The influence of O-2 gas mixing ratio on DLC film quality was investigated using the de magnetron sputtering method with a solid graphite target and Ar, CH4 and O-2 mixing gases. The O-2 mixing ratio was varied between 0% and 50%. Film quality was evaluated using Raman spectroscopy and XPS. When O-2 gas mixing ratio increased the peak in Raman spectra shifted gradually to higher wavenumbers and it:; bandwidth became narrower. This indicates graphite component increased in the DLC film. III addition, the lubricant coverage on oxygen-containing DLC was improved. Because adding oxygen increases the terminations of carbonyl group on DLC surface, this result suggests that the polar surface causes higher affinity for the lubricant.
引用
收藏
页码：415 / 419
页数：5
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