Optical emission spectroscopy in diamond-like carbon film deposition

被引：0
|
作者：
Zhang, Weiping [1 ]
Chen, Jing [1 ]
机构：
[1] Univ of Science and Technology of, China, Hefei, China
来源：
Vacuum | 1991年 / 42卷 / 16期
关键词：
Diamond Like Carbon - Optical Emission Spectroscopy - Plasma Chemical Vapor Deposition;
D O I：
10.1016/0042-207x(91)91425-n
中图分类号：
学科分类号：
摘要：
引用
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页码：1083 / 1084
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