Correlation Between Electrical Performance and Gate Width of GaN-Based HEMTs

被引:22
|
作者
Sun, Yue [1 ]
Zhang, Haochen [1 ]
Yang, Lei [1 ]
Hu, Kunpeng [1 ]
Xing, Zhanyong [1 ]
Liang, Kun [1 ]
Yu, Huabin [1 ]
Fang, Shi [1 ]
Kang, Yang [1 ]
Wang, Danhao [1 ]
Xu, Guangwei [1 ]
Sun, Haiding [1 ]
Long, Shibing [1 ]
机构
[1] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Anhui, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/GaN HEMT; gate-width modulation; temperature-dependent characterizations; BREAKDOWN VOLTAGE; ALGAN/GAN HEMTS; LINEARITY; CONFIGURATION;
D O I
10.1109/LED.2022.3183293
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we comprehensively studied the correlation between the electrical characteristics and the gate width (W-G) of GaN-based HEMTs. On the one hand, as W-G is scaled down from 100 mu m down to 3 mu m, the devices exhibit five-times-enhanced on-state drain current density and largely reduced on-resistance, thanks to the increased electron mobility and mitigated self-heating effects in the narrow-W-G channels. On the other hand, the devices with a wider W-G exhibit reduced off-state leakage current and enhanced breakdown voltage, thanks to a decreased electric field and increased Schottky barrier height. Further temperature-dependent characterization reveals that the W-G-modulation behavior on both on- and off-state device properties is still effective at a high temperature of 150 degrees C. These experimental results can provide a straightforward approach for effective channel modulation and device optimization of GaN-based power devices of the future.
引用
收藏
页码:1199 / 1202
页数:4
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