Growth and properties of double-sided YBCO films deposited by off-axis sputtering for microwave applications

被引：4
|
作者：
Wang, LM [1 ]
Liu, CC [1 ]
Horng, MY [1 ]
Tsao, JH [1 ]
Sung, HH [1 ]
机构：
[1] Da Yeh Univ, Dept Elect Engn, Changhua 515, Taiwan
来源：
JOURNAL OF LOW TEMPERATURE PHYSICS | 2003年 / 131卷 / 3-4期
关键词：
D O I：
10.1023/A:1022915722790
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The double-sided YBa2Cu3Oy (YBCO) films were grown on LaAlO3 (LAO) substrates by an off-axis magnetron sputtering system with two 2-inch sputtering guns. High-quality YBCO films within a 50-mm-diameter area were obtained. The homogeneous YBCO films revealed transition temperature T-c(R=0) of greater than or equal to 86 K and a critical current density J(c) (zero field) of similar to 1. 5 x 10(6) A/cm(2) at 77 K. The surface impedance of YBCO films was measured using a probe-coupling type microstripline resonator method. The surface resistance R-s of similar to 1.8 muOmega was obtained at 77 K around 2180 MHz. Additionally, a HTS three-pole bandpass filter was fabricated and revealed a good microwave characteristic. The influence of surface roughness on microwave properties of YBCO films was discussed.
引用
收藏
页码：551 / 556
页数：6
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