Optical and electrical investigation of DC micro-hollow cathode discharge in He/O2 and He/H2 mixture

被引:6
|
作者
Cho, Deog Gyun [1 ]
Moon, Se Youn [1 ,2 ]
机构
[1] Chonbuk Natl Univ, Dept Appl Plasma Engn, 567 Baekje Daero, Jeonju 54896, Jeollabuk Do, South Korea
[2] Chonbuk Natl Univ, Dept Quantum Syst Engn, 567 Baekje Daero, Jeonju 54896, Jeollabuk Do, South Korea
基金
新加坡国家研究基金会;
关键词
ULTRAVIOLET ABSORPTION-SPECTROSCOPY; GAS TEMPERATURE; PLASMA; HYDROGEN;
D O I
10.1063/1.5037699
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A hollow cathode discharge source was developed using a negatively biased micro-hole cathode to generate high density point-like plasma. Through electrical and optical investigations, the properties of gas discharge plasmas such as dissipated power, electronic excitation temperature, and rotational temperature were compared in glow and hollow cathode discharge conditions. In the hollow cathode discharge mode, the power consumption and excitation temperature were larger. It was also observed that the relatively higher intensity of vacuum ultraviolet (VUV) oxygen triple lines in He/O-2 plasma and VUV hydrogen Lyman-alpha line in He/H-2 plasma were realized in the hollow cathode discharge mode. Published by AIP Publishing.
引用
收藏
页数:6
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