Phase Thickness Deviations' Influence on Properties of Antireflection Coatings for Near Infrared Detectors

被引：0
|
作者：
Gyoch, B. [1 ]
Mashkov, P. [1 ]
Penchev, S. [1 ]
机构：
[1] Univ Ruse, Ruse, Bulgaria
来源：
2012 35TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE 2012): POWER ELECTRONICS | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Investigation deals with problems of computer-aided design of wide-band antireflection (AR) coatings for semiconductor photosensitive devices (discrete photo receivers, CCD-cameras, modern security systems and others) for spectral region 0.9 mu m - 1.7 mu m. In practice during deposition of multilayer coatings some deviations of desired coatings' thicknesses always occurs which worsens antireflection properties of the coatings. It is important to know how the phase thickness deviations influence on transmission spectrum of the system: substrate - AR coating. As a result of the analysis it is shown that six-layer structure possesses the lowest reflection and high stability when phase thickness deviations' occurs.
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页码：318 / 323
页数：6
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