Convex quartz crystal resonator of extremely high Q in 10MHz-50MHz

被引：6

作者：

Watanabe, F ^{[1
]}

Watanabe, T ^{[1
]}

机构：

[1] World Technol Instrument Co Ltd, Aoba Ku, Kanagawa 2270033, Japan

来源：

2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年

关键词：

D O I：

10.1109/ULTSYM.2002.1193566

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The micro machine technology which uses the optical contact phenomenon together with the grinding abrasive machining technology is researched as a method of enabling the highly precise processing of quartz. We have succeeded in the development of the convex quartz crystal resonator which uses a new three-dimensional highly precise processing. The fundamental mode operation is convex quartz resonator of 10MHz-50MHz, and a value dose to material Q of the quartz is obtained.

引用

页码：1007 / 1010

页数：4

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