Convex quartz crystal resonator of extremely high Q in 10MHz-50MHz

被引：6
|
作者：
Watanabe, F [1 ]
Watanabe, T [1 ]
机构：
[1] World Technol Instrument Co Ltd, Aoba Ku, Kanagawa 2270033, Japan
来源：
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年
关键词：
D O I：
10.1109/ULTSYM.2002.1193566
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The micro machine technology which uses the optical contact phenomenon together with the grinding abrasive machining technology is researched as a method of enabling the highly precise processing of quartz. We have succeeded in the development of the convex quartz crystal resonator which uses a new three-dimensional highly precise processing. The fundamental mode operation is convex quartz resonator of 10MHz-50MHz, and a value dose to material Q of the quartz is obtained.
引用
收藏
页码：1007 / 1010
页数：4
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