Probing the relationship between structural and optical properties of Si-doped AlN

被引:16
|
作者
Pantha, B. N. [1 ]
Sedhain, A. [1 ]
Li, J. [1 ]
Lin, J. Y. [1 ]
Jiang, H. X. [1 ]
机构
[1] Texas Tech Univ, Dept Elect & Comp Engn, Lubbock, TX 79409 USA
关键词
aluminium compounds; edge dislocations; elemental semiconductors; energy gap; III-V semiconductors; photoluminescence; screw dislocations; semiconductor doping; semiconductor epitaxial layers; silicon; wide band gap semiconductors; X-ray diffraction; MULTIPLE-QUANTUM WELLS; MU-M; WAVELENGTH;
D O I
10.1063/1.3374444
中图分类号
O59 [应用物理学];
学科分类号
摘要
Much efforts have been devoted to achieve conductivity control in the ultrahigh band gap (similar to 6.1 eV) AlN by Si doping. The effects of Si-doping on the structural and optical properties of AlN epilayers have been investigated. X-ray diffraction studies revealed that accumulation of tensile stress in Si-doped AlN is a reason for the formation of additional edge dislocations. Photoluminescence (PL) studies revealed that the linewidths of both band-edge and impurity related transitions are directly correlated with the density of screw dislocations, N-screw, which increases with the Si doping concentration (N-Si). Furthermore, it was formulated that the band-edge (impurity) PL emission linewidth increases linearly with increasing N-screw at a rate of similar to 3.3 +/- 0.7 meV/10(8) cm(-2) (26.5 +/- 4 meV/10(8) cm(-2)), thereby establishing PL measurement as a simple and effective method to estimate screw dislocation density in AlN epilayers.
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页数:3
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