A comprehensive study on the self-lubrication mechanisms of SU-8 composites

被引:6
|
作者
Saravanan, Prabakaran [1 ]
Sinha, Sujeet K. [2 ]
Jayaraman, Sundaramurthy [4 ]
Duong, Hai M. [3 ]
机构
[1] Kyushu Univ, Int Inst Carbon Neutral Energy Res WPI I2CNER, Fukuoka 8190395, Japan
[2] Indian Inst Technol Delhi, Dept Mech Engn, New Delhi 110016, India
[3] Natl Univ Singapore, Dept Mech Engn, Singapore 117576, Singapore
[4] Ngee Ann Polytech, Ctr Innovat, Environm & Water Technol, Singapore 599489, Singapore
关键词
Composite; Boundary lubrication; PFPE; Self-lubrication; MICROELECTROMECHANICAL SYSTEMS; TRIBOLOGICAL BEHAVIOR; MEMS; COATINGS; SURFACE; PARTS;
D O I
10.1016/j.triboint.2015.11.044
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Poor tribological properties of SU-8, a promising MEMS structural material, have been recently addressed by developing a perflouropolyether (Z-dol) lubricant droplet-filled SU-8 composite. The composite shows wear durability four orders of magnitude greater than that of SU-8. The chemical reaction between the SU-8 and PFPE molecules and the physical self-lubrication mechanism were found responsible for this dramatic improvement. In this work, the self-lubrication mechanism at the ball-composite interface of SU-8+5 wt% Z-dol composite was further investigated by varying sliding speed. Effects of normal load on the tribological responses of SU-8+5 wt% Z-dol composite was also investigated independently and various possible wear mechanisms are proposed. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:391 / 405
页数:15
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