Crystalline and amorphous structures of Ge-Sb-Te nanoparticles

被引:20
|
作者
Park, Gyeong-Su
Kwon, Ji-Hwan
Kim, Miyoung
Yoon, H. R.
Jo, W.
Kim, T. K.
Zuo, Jian-Min
Khang, Yoonho
机构
[1] Samsung Adv Inst Technol, Analyt Engn Ctr, Suwon 440600, South Korea
[2] Seoul Natl Univ, Dept Mat Sci & Engn, Seoul 151744, South Korea
[3] Ewha Womans Univ, Dept Phys, Seoul 120750, South Korea
[4] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[5] Samsung Adv Inst Technol, Semicond Device & Mat Lab, Suwon 440600, South Korea
关键词
D O I
10.1063/1.2752550
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report effects of thermal annealing on the structures of Ge-Sb-Te (GST) nanoparticles synthesized by pulsed laser ablation deposition. The average diameter of the GST nanoparticles is an order of 10 nm. The as-prepared sample contains nanocrystals surrounded by an amorphous phase. Further crystallization occurs during annealing. The structures of the nanocrystals and amorphous phase were studied by electron diffraction and radial distribution function analyses. The results show that the nanoparticles annealed at 100 degrees C are crystalline, consisting of a mixture of face centered cubic (fcc) and hexagonal Ge2Sb2Te5 (dominant). In comparison, the nanoparticles annealed at 200 degrees C are mostly fcc. The surrounding amorphous phase has similar atomic arrangements to the previously reported amorphous GST thin films. (c) 2007 American Institute of Physics.
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页数:5
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