Pyroelectric properties of sol-gel derived lithium tantalite thin films

被引：2
|
作者：
Kao, MC
Chen, HZ
Wang, CM
Chen, YC [1 ]
机构：
[1] Natl Sun Yat Sen Univ, Dept Elect Engn, Kaohsiung 804, Taiwan
[2] Hsiuping Inst Technol, Dept Elect Engn, Taichung 412, Taiwan
[3] Cheng Shiu Inst Technol, Dept Elect Engn, Kaohsiung 833, Taiwan
来源：
PHYSICA B-CONDENSED MATTER | 2003年 / 329卷
关键词：
LiTaO3; sol gel; thin films; voltage responsivity; specific detectivity;
D O I：
10.1016/S0921-4526(02)02271-8
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Lithium tantalite (LiTaO3) thin films (similar to0.5 mum) have been successfully deposited on Pt(I I I)/SiO2/Si(I 0 0) substrates by means of sol-gel spin-coating technology. Figures of merit for infrared detector were studied for the LiTaO3 thin films. There exists high figures of merit F-v of 2.1 x 10(-10) C cm/J and F. of 2.4 x 10(-8) C cm/J because of the relative low dielectric constant (epsilon(r)) of 35 and high pyroelectric coefficient (gamma) of 4.0 x 10(-8) C/cm(2) K of the films. The pyroelectric infrared detector fabricated by the LiTaO3 thin film exhibits a voltage reponsivity R-v of 4584 V/W at 20 Hz and a high specific detectivity D* of 4.23 x 10(7) cm Hz(1/2)/W at 100 Hz. (C) 2003 Elsevier Science B.V. All rights reserved.
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页码：1527 / 1528
页数：2
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