Composition measurement in substitutionally disordered materials by atomic resolution energy dispersive X-ray spectroscopy in scanning transmission electron microscopy

被引：16
|
作者：
Chen, Z. [1 ]
Taplin, D. J. [1 ]
Weyland, M. [2 ,3 ]
Allen, L. J. [4 ]
Findlay, S. D. [1 ]
机构：
[1] Monash Univ, Sch Phys & Astron, Clayton, Vic 3800, Australia
[2] Monash Univ, Monash Ctr Electron Microscopy, Clayton, Vic 3800, Australia
[3] Monash Univ, Dept Mat Sci & Engn, Clayton, Vic 3800, Australia
[4] Univ Melbourne, Sch Phys, Parkville, Vic 3010, Australia
来源：
ULTRAMICROSCOPY | 2017年 / 176卷
基金：
澳大利亚研究理事会;
关键词：
Scanning transmission electron microscopy; (STEM); Energy dispersive X-ray spectroscopy (EDX); Atomic-resolution imaging; Elemental quantification; BLOCH WAVE ANALYSIS; HAADF-STEM IMAGES; ADF-STEM; QUANTITATIVE-ANALYSIS; ABSOLUTE-SCALE; THIN SPECIMENS; PART I; CRYSTALS; QUANTIFICATION; DIFFRACTION;
D O I：
10.1016/j.ultramic.2016.10.006
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
The increasing use of energy dispersive X-ray spectroscopy in atomic resolution scanning transmission electron microscopy invites the question of whether its success in precision composition determination at lower magnifications can be replicated in the atomic resolution regime. In this paper, we explore, through simulation, the prospects for composition measurement via the model system of AlxGa1-xAs, discussing the approximations used in the modelling, the variability in the signal due to changes in configuration at constant composition, and the ability to distinguish between different compositions. Results are presented in such a way that the number of X-ray counts, and thus the expected variation due to counting statistics, can be gauged for a range of operating conditions.
引用
收藏
页码：52 / 62
页数：11
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