Polymer micro cantilevers for force controlled atomic force microscopy 2 - Fabrication of cantilevers

被引：0
|
作者：
Kato, N [1 ]
Park, CS [1 ]
Matsumoto, T [1 ]
Kikuta, H [1 ]
Iwata, K [1 ]
机构：
[1] Kinki Univ, Fac Biol Oriented Sic & Technol, Wakayama, Japan
来源：
SICE 2002: PROCEEDINGS OF THE 41ST SICE ANNUAL CONFERENCE, VOLS 1-5 | 2002年
关键词：
photo plastic; cantilever; force controlled atomic force microscope;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The micro cantilever made of entirely plastic material has been developed. The probing tip, cantilever and base are made of same photo plastic. By arranging the geometry of the cantilever, its spring constant and resonant frequency is controlled. The low Q of the polyimide improves the stability of the force controlled atomic force microscope. The fabrication error in cantilever geometry was 1.5%. The estimated resonant frequency has a good agreement with the designed value.
引用
收藏
页码：1033 / 1034
页数：2
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