共 50 条
- [41] Preparation and characterization of low-k mesoporous silica films RECENT ADVANCES IN THE SCIENCE AND TECHNOLOGY OF ZEOLITES AND RELATED MATERIALS, PTS A - C, 2004, 154 : 94 - 101
- [42] Characterization of low-k silica films by Raman Spectroscopy INMIC 2004: 8TH INTERNATIONAL MULTITOPIC CONFERENCE, PROCEEDINGS, 2004, : 694 - 697
- [44] Wave polymerization during vapor deposition of porous parylene-N dielectric films Materials Research Society Symposium - Proceedings, 1999, 565 : 23 - 28
- [46] Cohesive strength characterization of brittle low-k films PROCEEDINGS OF THE IEEE 2002 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2002, : 57 - 59
- [47] Wave polymerization during vapor deposition of porous parylene-N dielectric films LOW-DIELECTRIC CONSTANT MATERIALS V, 1999, 565 : 23 - 28
- [49] Silica zeolite low-K dielectric thin films. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U478 - U478