The phase transformation and mechanical behavior of NiTi thin films

被引:0
|
作者
Yuan, ZY [1 ]
Cheng, XL [1 ]
Xu, D [1 ]
Ye, ZC [1 ]
Zhang, YF [1 ]
Cai, BC [1 ]
机构
[1] Shanghai Jiao Tong Univ, Res Inst Micro Nanometer Sci & Technol, Minist Educ, Key Lab Thin Film & Microfabricat Technol, Shanghai 200030, Peoples R China
关键词
NiTi thin film; phase transformation; shape memory effect; superelasticity; tensile; bulging; indentation;
D O I
10.1117/12.607619
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The phase transformation and superelastic properties of NiTi thin films prepared by sputtering were studied. Thin films' phase transformation process was analyzed with resistance temperature curves and X-ray diffraction spectroscopy. Meanwhile, the structure and transformation temperature were gained. In order to characterize their superelasticity, tensile and bulging and indentation test were performed.
引用
收藏
页码:196 / 199
页数:4
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