Temperature-induced phase separation in chromium films

被引:11
|
作者
Saraf, L [1 ]
Wang, CM [1 ]
Engelhard, MH [1 ]
Baer, DR [1 ]
机构
[1] Pacific NW Natl Lab, Fundamental Sci Directorate, Richland, WA 99352 USA
关键词
D O I
10.1063/1.1565686
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vacuum evaporation of chromium on Si(100) results in an interfacial nanophase layer followed by a mixed grain region. In this work, the mixed grain region in chromium is nearly transformed into a single-phase region, which resulted in a maximum phase separation between the nano-delta-A15 phase and bulk alpha-bcc chromium. It is achieved by creating a temperature gradient across the chromium-silicon interface by using rapid evaporation at a growth rate of similar to3 mum/min at a source-to-substrate (SS) distance of 2 cm. Separately grown nanophase chromium films at SS distance of 32 cm show a predominant delta-A15 phase. Short-SS-distance rapid evaporation has the potential to produce selective phase separation by combining the temperature gradient with interfacial stress. (C) 2003 American Institute of Physics.
引用
收藏
页码:2230 / 2232
页数:3
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