Measurement of the static characteristic of pressure sensors

被引：0
|
作者：
Fen, JX [1 ]
机构：
[1] Fuzhou Univ, Dept Elect Sci & Appl Phys, Fuzhou 350002, Peoples R China
来源：
ICEMI '97 - CONFERENCE PROCEEDINGS: THIRD INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS | 1997年
关键词：
pressure sensor; sensitivity; linearity;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
there are several methods for measuring the static characteristic of pressure sensors. In this paper we state and adopt the connecting terminals linear scale method to measure the linearity, sensitivity, and hysteresis of the double-island diffusing silicon piezoresistive pressure sensor (PT14).
引用
收藏
页码：349 / 352
页数：4
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