Road to commercialize ArF technology for Si photonics through wafer-level assessment

被引：0
|
作者：
Zhou, Haifeng [1 ]
Thi, Win Kay [1 ]
Kiong, Chen Kok [1 ]
Li, Chao [1 ]
Zhang, Huijuan [1 ]
Eu-Jin, Andy Lim [1 ]
Yu, Mingbin [1 ]
Lo, Guoqiang [1 ]
机构：
[1] ASTAR, Inst Microelect, 11 Sci Pk Rd,Sci Pk 2, Singapore 117685, Singapore
来源：
2015 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2015年
关键词：
SILICON-ON-INSULATOR; CIRCUITS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The development and assessment of ArF technology in a 200min FAB line are described. Wafer-level measurement is implemented to explore the dummy pattern effect on cross-wafer uniformity and examine fundamental Si photonics devices.
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页数：3
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