Effects of thermal annealing on emission characteristics and emitter surface properties of a Spindt-type field emission cathode

被引：6
|
作者：
Ito, F
Konuma, K
Okamoto, A
Yano, A
机构：
[1] NEC Corp Ltd, Silicon Syst Res Labs, Kanagawa 22911, Japan
[2] NEC Corp Ltd, Elect Component Dev Div, Kanagawa 22911, Japan
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 02期
关键词：
D O I：
10.1116/1.590218
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The effects of thermal annealing below 500 degrees C on Spindt-type molybdenum field emitter arrays were studied through the field emission characteristics and Mo surface analysis. The anode current of the field emitter arrays increases with increasing annealing time and then saturates after a certain period that is shorter for higher-temperature annealing. These phenomena are clearly explained by the molybdenum trioxide (MoO3) desorption revealed by studies using x-ray photoelectron spectroscopy and temperature programmed desorption, and by calculation of MoO3 desorption rates. The MoO3 desorption is the predominant effect for low-temperature annealing and the increase in the anode current is mainly due to lowering of the work function after MoO3 desorption. (C) 1998 American Vacuum Society. [S0734-211X(98)05002-1].
引用
收藏
页码：783 / 786
页数：4
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