Optical polymers with tunable refractive index for nanoimprint technologies

被引:4
|
作者
Landwehr, J. [1 ]
Fader, R. [1 ,3 ]
Rumler, M. [1 ,3 ]
Rommel, M. [1 ]
Bauer, A. J. [1 ,3 ]
Frey, L. [1 ,2 ,3 ]
Simon, B. [4 ,5 ]
Fodor, B. [4 ,5 ]
Petrik, P. [4 ]
Schiener, A. [6 ]
Winter, B. [7 ]
Spiecker, E. [7 ]
机构
[1] Fraunhofer Inst Integrated Syst & Device Technol, D-91058 Erlangen, Germany
[2] Univ Erlangen Nurnberg, Chair Electron Devices, D-91058 Erlangen, Germany
[3] Erlangen Grad Sch Adv Opt Technol SAOT, D-91052 Erlangen, Germany
[4] Res Inst Tech Phys & Mat Sci, H-1121 Budapest, Hungary
[5] Univ Pecs, Fac Sci, H-7624 Pecs, Hungary
[6] Univ Erlangen Nurnberg, Chair Crystallog & Struct Phys, D-91058 Erlangen, Germany
[7] Univ Erlangen Nurnberg, Ctr Nanoanal & Electron Microscopy CENEM, D-91058 Erlangen, Germany
关键词
substrate conformal imprint lithography; composite materials; UV polymers; TiO2; nanoparticles; refractive index matching; LITHOGRAPHY;
D O I
10.1088/0957-4484/25/50/505301
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In order to realize a versatile high throughput production of micro-optical elements, UV-curable polymer composites containing titanium dioxide nanoparticles were prepared and characterized. The composites are based on an industrial prototype epoxy polymer. Titanium dioxide nanoparticles smaller than 10 nm were synthesized by the nonaqueous sol method and in situ sterically stabilized by three different organic surfactants. The composites exhibit high transparency. Distinct alteration of optical transmission properties for visible light and near IR wavelength range could be avoided by adaption of the stabilizing organic surfactant. Most importantly, the refractive index (RI) of the composites that depends on the fraction of incorporated inorganic nanoparticles could be directly tuned. E.g. the RI at a wavelength of 635 nm of a composite containing 23 wt% titanium dioxide nanoparticles is increased to 1.626, with respect to a value of 1.542 for the pure polymer. Furthermore, it could be demonstrated that the prepared inorganic-organic nanocomposites are well suited for the direct fabrication of low-cost micro-optical elements by nanoimprint lithography. A low response of the optical composite properties to temperature treatment up to 220 degrees C with a shrinkage of only about 4% ensures its application for integrated micro-optical elements in industrial production.
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页数:10
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