Specific features of nonequilibrium depletion accompanied by the trapping of minority carriers by surface states in metal-insulator-semiconductor structures

被引:2
|
作者
Tikhov, S. V. [1 ]
Gorshkov, O. N. [1 ,2 ]
Koryazhkina, M. N. [1 ]
Antonov, I. N. [1 ,2 ]
Kasatkin, A. P. [1 ]
机构
[1] Lobachevsky State Univ Nizhny Novgorod, Nizhnii Novgorod 603950, Russia
[2] Lobachevsky State Univ Nizhny Novgorod, Res Inst Phys & Technol, Nizhnii Novgorod 603950, Russia
关键词
OXIDE;
D O I
10.1134/S1063785016020139
中图分类号
O59 [应用物理学];
学科分类号
摘要
Specific features (abrupt changes in current caused by voltage variation) of nonequilibrium depletion in metal-insulator-semiconductor structures based on gallium arsenide and silicon with a 40-nm-thick film of yttria-stabilized zirconia were revealed. These features may help extend the range of application of the nonequilibrium depletion effect in microelectronics.
引用
收藏
页码:138 / 142
页数:5
相关论文
共 50 条
  • [1] Specific features of nonequilibrium depletion accompanied by the trapping of minority carriers by surface states in metal–insulator–semiconductor structures
    S. V. Tikhov
    O. N. Gorshkov
    M. N. Koryazhkina
    I. N. Antonov
    A. P. Kasatkin
    Technical Physics Letters, 2016, 42 : 138 - 142
  • [2] INFLUENCE OF GENERATION OF MINORITY-CARRIERS ON CAPACITANCE SPECTROSCOPY OF SURFACE-STATES IN METAL-INSULATOR-SEMICONDUCTOR STRUCTURES
    LEBEDEV, AA
    ECKE, W
    YUFEREV, VS
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1985, 19 (10): : 1100 - 1103
  • [3] Generation of minority charge carriers at the semiconductor surface during thermally activated ionic depolarization of metal-insulator-semiconductor structures
    Gol'dman, EI
    Zhdan, AG
    Kukharskaya, NF
    Chucheva, GV
    SEMICONDUCTORS, 2000, 34 (03) : 277 - 283
  • [4] Generation of minority charge carriers at the semiconductor surface during thermally activated ionic depolarization of metal-insulator-semiconductor structures
    E. I. Gol’dman
    A. G. Zhdan
    N. F. Kukharskaya
    G. V. Chucheva
    Semiconductors, 2000, 34 : 277 - 283
  • [5] A manifestation of the tunneling conductivity of a thin-gate insulator in the generation kinetics of minority carriers in metal-insulator-semiconductor structures
    A. G. Zhdan
    G. V. Chucheva
    E. I. Goldman
    Semiconductors, 2006, 40 : 190 - 196
  • [6] Increase in the rate and discretization of the kinetics of isothermal surface generation of minority charge carriers in metal-insulator-semiconductor structures with a planar-inhomogeneous insulator
    Zhdan, AG
    Goldman, EI
    Gulyaev, YV
    Chucheva, GV
    SEMICONDUCTORS, 2005, 39 (06) : 666 - 673
  • [7] A manifestation of the tunneling conductivity of a thin-gate insulator in the generation kinetics of minority carriers in metal-insulator-semiconductor structures
    Zhdan, A. G.
    Chucheva, G. V.
    Goldman, E. I.
    SEMICONDUCTORS, 2006, 40 (02) : 190 - 196
  • [8] Increase in the rate and discretization of the kinetics of isothermal surface generation of minority charge carriers in metal-insulator-semiconductor structures with a planar-inhomogeneous insulator
    A. G. Zhdan
    E. I. Goldman
    Yu. V. Gulyaev
    G. V. Chucheva
    Semiconductors, 2005, 39 : 666 - 673
  • [9] Analysis of interface states in LaSixOy, metal-insulator-semiconductor structures
    Inoue, Naoya
    Lichtenwalner, Daniel J.
    Jur, Jesse S.
    Kingon, Angus I.
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (10 A): : 6480 - 6488
  • [10] Analysis of interface states in LaSixOy metal-insulator-semiconductor structures
    Inoue, Naoya
    Lichtenwalner, Daniel J.
    Jur, Jesse S.
    Kingon, Angus I.
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (10A): : 6480 - 6488