Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data

被引:11
|
作者
Jaraiz, M [1 ]
Rubio, E
Castrillo, P
Pelaz, L
Bailon, L
Barbolla, J
Gilmer, GH
Rafferty, CS
机构
[1] ETSI Telecomunicac, Valladolid 47011, Spain
[2] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
Monte Carlo; ab initio; process simulation;
D O I
10.1016/S1369-8001(00)00013-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Kinetic Monte Carlo (KMC) atomistic process simulations mimic the jumps and interactions of individual atoms, based on jump rates derived from ab initio calculations or experiments. By only following 'defect' atoms (unlike molecular dynamics), KMC can simulate the typical long annealing times (seconds to hours) used in materials processing. Thus, it provides a detailed and accurate link between parameters obtained from ab initio calculations and experiments performed under typical processing conditions. We describe the simulation scheme and discuss some of the unique features of this simulation technique with the help of results obtained with it. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:59 / 63
页数:5
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