The cleaning of surfaces and coating deposition with the use of low temperature RF discharge plasmas

被引：0
|
作者：
Volkov, ED [1 ]
Nazarov, NI [1 ]
Glazunov, GP [1 ]
机构：
[1] Kharkov Phys & Technol Inst, Natl Sci Ctr, Inst Plasma Phys, UA-310108 Kharkov, Ukraine
来源：
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS | 1999年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
引用
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页码：205 / 206
页数：2
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