A preparation technology of micro-structure glass based on mixed micro and nano powders

被引：0

作者：

Zhu, Minjie ^{[1
]}

Liu, Rui ^{[2
]}

Sang, Hongbo ^{[1
,3
]}

Du, Xiaohui ^{[1
]}

Liu, Shuai ^{[1
]}

Liu, Xinyu ^{[4
]}

Ji, Kemeng ^{[4
]}

Xiong, Yanwei ^{[2
]}

Li, Xiaojuan ^{[2
]}

Liu, Yifang ^{[3
]}

Wang, Lingyun ^{[3
]}

机构：

[1] Instrumentat Technol & Econ Inst, Sensor & Network Ctr, Beijing 100055, Peoples R China

[2] Beijing Smart Chip Microelect Technol Co Ltd, Beijing 102299, Peoples R China

[3] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Fujian, Peoples R China

[4] Tianjin Univ, Sch Chem Engn & Technol, Tianjin 300350, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2022年 / 32卷 / 06期

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

mixed micro and nano powders; glass reflow; micro-structure glass; MEMS applications; RAY PHOTOELECTRON-SPECTROSCOPY; BOROSILICATE GLASS; FABRICATION;

D O I：

10.1088/1361-6439/ac68cb

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a method for the preparation of glass by reflowing commercial mixed micro and nano powders. High-quality micro-structure glass is formed by a microfabrication process combined with reflow process of the mixed micro and nano powders. The quality of glass prepared by different components was investigated and analyzed. Characterization of the formed glass micro-structure was performed by combining scanning electrical microscopy, energy dispersive spectroscopy, x-ray diffraction, and x-ray photoelectron spectroscopy. The glass reflow results were compared with the anodic bonding sample, which showed micro-structure glass prepared by our method was well-formed with high density and transparency. These results may inspire new possibilities for glass-based microsystems and MEMS applications.

引用

页数：7

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