Growth of rough-surface p-GaN layers on InGaN/GaN multiple-quantum-well structures by metalorganic chemical vapor deposition and their application to GaN-based solar cells

被引:9
|
作者
Mori, Takuma [1 ]
Egawa, Takashi [1 ,2 ]
Miyoshi, Makoto [1 ,2 ]
机构
[1] Nagoya Inst Technol, Res Ctr Nano Devices & Adv Mat, Nagoya, Aichi 4668555, Japan
[2] Nagoya Inst Technol, Innovat Ctr Multibusiness Nitride Semicond, Nagoya, Aichi 4668555, Japan
来源
MATERIALS RESEARCH EXPRESS | 2017年 / 4卷 / 08期
基金
日本科学技术振兴机构;
关键词
GaN; MOCVD; solar cell; FILMS; TEMPERATURE; LEDS;
D O I
10.1088/2053-1591/aa8147
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We conducted the study on the growth of rough-surface p-GaN layers on InGaN/GaN multiple-quantum-well (MQW) structures by metalorganic chemical vapor deposition (MOCVD). It was found that the sum of InGaN well thickness t(well_total) was a predominant factor to form the rough surface, in addition to the growth temperature as low as 800 degrees C for the p-GaN layers. Microstructure analyses revealed that the rough surfaces consisted of a certain number of hexagonal V-shaped pits starting from dislocations propagated through an under layer and they increased with the increased t(well_total). It was confirmed that the light absorption was enlarged for MQW structure samples with rough-surface p-GaN layers on the top, owing to not only the thickness effect in MQWs but also their reduced light reflection on the surfaces. It was also confirmed that these optical properties contributed to the performance improvement in InGaN/GaN MQW solar cells.
引用
收藏
页数:8
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