The influence of SrTiO3/Si interface treatment by Sr and Ti on structural properties of SrTiO3 thin films

被引：0
|
作者：
Spanková, M
Chromik, S
Sedlácková, K
Vávra, I
Gazi, S
Kús, P
机构：
[1] Slovak Acad Sci, Inst Elect Engn, Bratislava 84239, Slovakia
[2] Comenius Univ, Fac Math Phys & Informat, Bratislava 84239, Slovakia
来源：
SOLID STATE CHEMISTRY V | 2003年 / 90-91卷
关键词：
SrTiO3; interface; silicon; crystallinity; transmission electron microscopy;
D O I：
10.4028/www.scientific.net/SSP.90-91.589
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
SrTiO3 thin films have been grown on Si (110) substrates by on-axis radio frequency magnetron sputtering. It is difficult to achieve epitaxial growth on Si because of the naturally oxidized Si surface. In order to reduce the oxide layer at the substrate-film interface, metallic Sr and Ti are deposited by thermal and electron beam evaporation, respectively. These metallic layers deoxidize the native oxide layer on the Si substrates. Using X-ray diffraction method and Transmission Electron Microscopy we study how the Sr and Ti layers with a thickness of about 10 nm influence the structural properties of the SrTiO3 thin films.
引用
收藏
页码：589 / 594
页数：6
相关论文
共 50 条
  • [41] Structural properties of epitaxial SrTiO3 thin films grown by molecular beam epitaxy on Si(001)
    Delhaye, G.
    Merckling, C.
    El-Kazzi, M.
    Saint-Girons, G.
    Gendry, M.
    Robach, Y.
    Hollinger, G.
    Largeau, L.
    Patriarche, G.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (12)
  • [42] Structural properties of epitaxial SrTiO3 thin films grown by molecular beam epitaxy on Si(001)
    Delhaye, G.
    Merckling, C.
    El-Kazzi, M.
    Saint-Girons, G.
    Gendry, M.
    Robach, Y.
    Hollinger, G.
    Largeau, L.
    Patriarche, G.
    Journal of Applied Physics, 2006, 100 (12):
  • [43] Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates
    Jia, C.L. (c.jia@fz-juelich.de), 1600, American Institute of Physics Inc. (92):
  • [44] Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates
    He, JQ
    Regnery, S
    Jia, CL
    Qin, YL
    Fitsilis, F
    Ehrhart, P
    Waser, R
    Urban, K
    Wang, RH
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (12) : 7200 - 7205
  • [45] Stabilities of the Intrinsic Defects on SrTiO3 Surface and SrTiO3/LaAlO3 Interface
    Gu, Mingqiang
    Wang, Jianli
    Wu, X. S.
    Zhang, G. P.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (47): : 24993 - 24998
  • [46] Influence of SrTiO3 capping layer on the charge transport at the interfaces of SrTiO3/LaAlO3/SrTiO3 (100) heterostructure
    Singh, Akhilesh Kr.
    Wu, Tsung-Chi
    Chen, Ming-Chin
    Song, Ming-Yuan
    Lee, Wei-Li
    Su, Chia-Ping
    Chu, M. -W
    PHYSICAL REVIEW MATERIALS, 2018, 2 (11):
  • [47] DFT study of Pt adsorption on low index SrTiO3 surfaces:: SrTiO3(100), SrTiO3(111) and SrTiO3(110)
    Asthagiri, A
    Sholl, DS
    SURFACE SCIENCE, 2005, 581 (01) : 66 - 87
  • [48] Influence of Sr deficiency on structural and electrical properties of SrTiO3 thin films grown by metal–organic vapor phase epitaxy
    Aykut Baki
    Julian Stöver
    Tobias Schulz
    Toni Markurt
    Houari Amari
    Carsten Richter
    Jens Martin
    Klaus Irmscher
    Martin Albrecht
    Jutta Schwarzkopf
    Scientific Reports, 11
  • [49] Electrical characterization of SrTiO3 thin films grown on Nb-doped SrTiO3 single crystals
    Morito, K
    Suzuki, T
    Sekiguchi, S
    Okushi, H
    Fujimoto, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (01): : 166 - 171
  • [50] Electrical characterization of SrTiO3 thin films grown on Nb-doped SrTiO3 single crystals
    Morito, Kentaro, 1600, JJAP, Tokyo, Japan (39):
12345