Observation of discrete dopant potential and its application to Si single-electron devices

被引:18
|
作者
Tabe, Michiharu [1 ]
Moraru, Daniel [1 ]
Ligowski, Maciej [1 ,2 ]
Anwar, Miftahul [1 ]
Yokoi, Kiyohito [1 ]
Jablonski, Ryszard [2 ]
Mizuno, Takeshi [1 ]
机构
[1] Shizuoka Univ, Res Inst Elect, Naka Ku, Hamamatsu, Shizuoka 4328011, Japan
[2] Warsaw Univ Technol, Div Sensors & Measuring Syst, PL-02525 Warsaw, Poland
关键词
Single-electron transfer; Quantum dots; Single dopant potential; Silicon-on-insulator; Kelvin probe force microscope; MICROSCOPY;
D O I
10.1016/j.tsf.2009.10.051
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Single-electron devices are attractive because of their ultimate capabilities such as single-electron transfer, single-electron memory, single-photon detection and high sensitivity to elemental amount of charge. We studied single-electron transport in doped nanoscale-channel field-effect transistors in which the channel potential is modulated by ionized dopants. These devices work as arrays of quantum dots with dimensions below present lithography limits. We demonstrate the ability of dopant-induced quantum dot arrays to mediate the transfer of individual electrons one at a time (single-electron transfer). We also monitored the actual dopant distribution and observed single dopant potentials using low temperature Kelvin probe force microscopy. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:S38 / S43
页数:6
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