Non-linear effects in Ta sputtering by Aum- ions

被引：10

作者：

Morozov, SN ^{[1
]}

Rasulev, UK ^{[1
]}

机构：

[1] Uzbek Acad Sci, Arifov Inst Elect, Akademgorodok, Tashkent 700125, Uzbekistan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2003年 / 203卷

关键词：

emission; cluster; sputtering; thermal spikes;

D O I：

10.1016/S0168-583X(02)02216-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Emission of atomic and cluster ions of Ta-n(+) (n = 1-11) has been studied experimentally in sputtering of a Ta target by n Au-m(-) (m = 1-9) cluster ions with energies of 6-21 keV. The high non-additive yield of the secondary ions under molecular bombardment has been observed. Increasing the number of atoms in the bombarding Au-m(-) ions a substantial non-linear increase in the yield of atomic Ta+ ions with quasi-thermal energy has been found. The results obtained have proved experimentally the availability of thermal spikes under cluster bombardment. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：192 / 197

页数：6

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