Non-contact interferometric measurement of the vibrations parameters under diffuse light reflection

被引:0
|
作者
Tavrov, AV [1 ]
机构
[1] Nanotech Co Ltd, Dept Opt, Moscow 117393, Russia
关键词
interferometry; motion measurement;
D O I
10.1117/12.294522
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The interferometric technique based on laser autodyne interferometer has been applied for the digital measurement of periodic micromovements of a sample. The measured oscillation parameters are: the amplitude, the frequency and the real time monitoring of the form. of the micromovement. The technique does not critically to the adjustment of reflected beam on a sample and works with the diffuse light reflection. The frequency band is from several Hz up to 10(5) Hz and amplitudes range is from 1 mu m up to 1 mm. In case of harmonical oscillations the accuracy of measurement was obtained better than 2%. Theoretical and practical aspects of the performance measurement with laser autodyne are discussed.
引用
收藏
页码:295 / 297
页数:3
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