The preparation of diamond films on new composite ceramic substrates of diamond and alumina

被引：0
|
作者：
Shen, Y [1 ]
Xia, YB [1 ]
Gu, F [1 ]
Su, QF [1 ]
Zhang, JC [1 ]
机构：
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China
来源：
FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 2004年 / 5774卷
关键词：
diamond; alumina; composite ceramic substrate; SEM; Raman spectra;
D O I：
10.1117/12.607629
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper reports the preparation and properties of diamond films deposited on new composite ceramic substrates of diamond and alumina. The influences of the substrates to the properties of diamond films were discussed. The Raman spectra and SEM show that the substrates which prepared by hot pressing sintering were more suitable to deposit high quality diamond films. The main reason why diamond films deposited on composite ceramic substrates without any pre-treatment have good qualities and why the composite ceramic substrate is appropriated to deposit large area diamond films are studied.
引用
收藏
页码：220 / 223
页数：4
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