Study on Silicon-based Micro-fluxgate Permalloy Core Film

被引：0
|
作者：
Liangjintao [1 ]
Wei, Liushibin Luo [1 ]
机构：
[1] NW Polytech Univ Line, Sch Elect & Informat, Xian, Peoples R China
来源：
ICIEA: 2009 4TH IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS, VOLS 1-6 | 2009年
关键词：
core thin film; soft magnetic properties; micro-fluxgate; double cores fluxgate sensor; SENSOR;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Silicon-based Micro-fluxgate Permalloy core thin films have been prepared by ion beam deposition film technique. Its microstructure, morphology and compositions were characterized using X-ray diffractometer, scanning electron microscope and EDS attached to SEM. The magnetic hysteresis loops were measured by a vibration sample magnetometer. The core films were measured by a double cores fluxgate sensor. The result shows that the coercivity (He) of Silicon-based Permalloy core thin film reached a minimum value of 0.1Oe. The film material is suitable for the application in the micro-fluxgate.
引用
收藏
页码：1187 / 1189
页数：3
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