Study on Silicon-based Micro-fluxgate Permalloy Core Film

Silicon-based Micro-fluxgate Permalloy core thin films have been prepared by ion beam deposition film technique. Its microstructure, morphology and compositions were characterized using X-ray diffractometer, scanning electron microscope and EDS attached to SEM. The magnetic hysteresis loops were measured by a vibration sample magnetometer. The core films were measured by a double cores fluxgate sensor. The result shows that the coercivity (He) of Silicon-based Permalloy core thin film reached a minimum value of 0.1Oe. The film material is suitable for the application in the micro-fluxgate.