Formation of silicon oxide nanowires directly from Au/Si and Pd-Au/Si substrates

被引:29
|
作者
Park, Hyun-Kyu
Yang, Beelyong
Kim, Sang-Woo
Kim, Gil-Ho
Youn, Doo-Hyeb
Kim, Sang-Hyeob
Maeng, Sung-Lyul
机构
[1] Kumoh Natl Inst Technol, Sch Adv Mat & Syst Engn, Gyeongbuk 730701, South Korea
[2] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 440746, South Korea
[3] Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol, Suwon 440746, South Korea
[4] Elect & Telecommun Res Inst, Cambridge ETRI Joint R&D Ctr, Taejon 305700, South Korea
来源
关键词
silicon oxide; nanowire; CVD; silicon substrate;
D O I
10.1016/j.physe.2006.08.003
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphous silicon oxide (SiOx) nanowires were directly grown by thermal processing of Si substrates. Au and Pd-Au thin films with thicknesses of 3 nm deposited on Si (0 0 1) substrates were used as catalysts for the growth of nanowires. High-yield synthesis of SiOx nanowires was achieved by a simple heating process (1000-1150 degrees C) in an Ar ambient atmosphere without introducing any additional Si source materials. The as-synthesized products were characterized by field-emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, and transmission electron microscopy measurements. The SiOx nanowires with lengths of a few and tens of micrometers had an amorphous crystal structure. The solid-liquid-solid model of nanowire formation was shown to be valid. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:158 / 162
页数:5
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