Determination of the direction and rate of movement of the metal-plasma interface upon the ion-plasma treatment of metals

被引:0
|
作者
Pivovarov, AL [1 ]
机构
[1] GV Kurdyumov Met Phys Inst, UA-252680 Kiev, Ukraine
来源
METALLOFIZIKA I NOVEISHIE TEKHNOLOGII | 1998年 / 20卷 / 02期
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A method for calculation of the variation of atoms' quantify in the initial surface layer of the metal, which interacts with energetic particles, has been developed. This method rakes into account the processes of sputtering, redeposition of the sputtered particles, and surface adsorption, of the radiation-generated interstitials according to the model proposed in Ref: [4]. The numerical calculations of variation of atoms' quantity (N) in the initial surface layer per one impinging particle have been carried out for three bombarding particle-metal combinations: He+-Fe, Ar+-Fe, and Kr+-Fe. The results have been obtained for the 50-1000 eV energy range and for the different values of redeposition coefficient. it is shown that there is an energy interval in the low-energy range of bombarding particles for which N > 0. If attests to the possibility in principle for a movement of the metal-plasma interface towards due plasma. This energy interval expands both with growth of mass of the bombarding particles and with increasing the redeposition coefficient. A comparison of the numerical calculations and experimental results has been carried out.
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页码:39 / 45
页数:7
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