Large-scale polysilicon surface micro-machined spatial light modulator

被引：1
|
作者：
Dimas, C [1 ]
Perreault, J [1 ]
Cornelissen, S [1 ]
Dyson, H [1 ]
Krulevitch, P [1 ]
Bierden, P [1 ]
Bifano, T [1 ]
机构：
[1] Boston Micromachiens Corp, Watertown, MA USA
来源：
MOEMS AND MINATURIZED SYSTEMS III | 2003年 / 4983卷
关键词：
spatial light modulators; micro mirrors; actuator frequency response;
D O I：
10.1117/12.477932
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scale arrays of micro mirrors and results are reported.
引用
收藏
页码：204 / 210
页数：7
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