Pixelated phase-mask dynamic interferometer

被引:296
|
作者
Millerd, J [1 ]
Brock, N [1 ]
Hayes, J [1 ]
North-Morris, M [1 ]
Novak, M [1 ]
Wyant, J [1 ]
机构
[1] 4D Technol Corp, Tucson, AZ 85706 USA
关键词
D O I
10.1117/12.560807
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We demonstrate a new type of spatial phase-shifting, dynamic interferometer that can acquire phase-shifted interferograms in a single camera frame. The interferometer is constructed with a pixelated phase-mask aligned to a detector array. The phase-mask encodes a high-frequency spatial interference pattern on two collinear and orthogonally polarized reference and test beams. The phase-difference between the two beams can be calculated using conventional N-bucket algorithms or by spatial convolution. The wide spectral response of the mask and true common-path design permits operation with a wide variety of interferometer front ends, and with virtually any light source including white-light.
引用
收藏
页码:304 / 314
页数:11
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