Interfaces of CVD diamond films on silicon (001)

被引：0
|
作者：
Wittorf, D [1 ]
Jager, W
Jia, CL
Urban, K
Floter, A
Guttler, H
Zachai, R
机构：
[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany
[2] Univ Kiel, Tech Fak, D-24243 Kiel, Germany
[3] Daimler Benz AG, Forschungszentrum Ulm, D-89013 Ulm, Germany
来源：
MICROSCOPY OF SEMICONDUCTING MATERIALS 1997 | 1997年 / 157期
关键词：
D O I：
暂无
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Interfaces and orientation relationships between diamond films, Si and beta-SiC interlayers were analyzed by conventional and high-resolution transmission electron microscopy for the early stages of film deposition on Si (001) substrates under optimized conditions using the microwave-assisted chemical vapour deposition process. Epitaxially oriented diamond nuclei form particularly on (111) facets of a nanocrystalline beta-SiC interlayer. A model describing the early stages of diamond film formation on (001)-oriented Si substrates via formation of a beta-SiC interlayer is presented.
引用
收藏
页码：451 / 456
页数：6
相关论文
共 50 条
  • [31] Preparation and characteristics of CVD diamond films
    Zou, Guangtian
    Yu, San
    Jin, Zengsun
    Lu, Xianyi
    Vacuum, 1991, 42 (16)
  • [32] CVD diamond films as photon detectors
    Galluzzi, F
    Marinelli, M
    Masotti, L
    Milani, E
    Pace, E
    Rossi, MC
    Salvatori, S
    Santoro, M
    Sciortino, S
    Rinati, GV
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1998, 409 (1-3): : 423 - 425
  • [33] Dark and photoconductivity in CVD diamond films
    Iakoubovskii, K
    Adriaenssens, GJ
    Nesladek, M
    Stals, L
    PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON DIAMOND MATERIALS, 1998, 97 (32): : 582 - 596
  • [34] Thermochemical polishing of CVD diamond films
    Fern Universitaet Hagen, Hagen, Germany
    Diamond Relat Mater, 8 (1108-1117):
  • [35] Thermal conductivity of CVD diamond films
    Chae, HB
    Park, KH
    Seong, DJ
    Kim, JC
    Baik, YJ
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1996, 17 (03) : 695 - 703
  • [36] Textured and heteroepitaxial CVD diamond films
    Jiang, X
    THIN-FILM DIAMOND I, 2003, 76 : 1 - 47
  • [37] CVD diamond films for SOI technologies
    Ralchenko, V
    Galkina, T
    Klokov, A
    Sharkov, A
    Chernook, S
    Martovitsky, V
    SCIENCE AND TECHNOLOGY OF SEMICONDUCTOR-ON-INSULATOR STRUCTURES AND DEVICES OPERATING IN A HARSH ENVIRONMENT, 2005, 185 : 77 - 84
  • [38] Thermoluminescence properties of CVD diamond films
    Pospísil, J
    Bulír, R
    Budinská, Z
    Novák, R
    Sopko, B
    Spevácek, V
    Cechák, T
    Hlídek, P
    Matejka, P
    Macková, A
    Cejnarová, A
    Krása, J
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2003, 199 (01): : 131 - 137
  • [39] Precision micromachining of CVD diamond films
    Park, JK
    Ayres, VM
    Asmussen, J
    Mukherjee, K
    DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) : 1154 - 1158
  • [40] Hydrogen incorporation in CVD diamond films
    Ralchenko, V
    Khomich, A
    Khmelnitskii, R
    Vlasov, A
    HYDROGEN MATERIALS SCIENCE AND CHEMISTRY OF METAL HYDRIDES, 2002, 82 : 203 - 212
12345