USING A CURRENT SOURCE TO IMPROVE EFFICIENCY OF A PLASMA SYSTEM

被引:0
|
作者
Zabihi, Sasan [1 ]
Zare, Firuz [1 ]
Akiyama, Hidenori [2 ]
机构
[1] Queensland Univ Technol, Sch Elect Engn, GPO Box 2434, Brisbane, Qld 4001, Australia
[2] Kumamoto Univ, Kumamoto 860, Japan
关键词
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents the possibility of utilizing a current source topology instead of a voltage source as an efficient, flexible and reliable power supply for plasma applications. A buck-boost converter with a current controller has been used to transfer energy from an inductor to a plasma system. A control strategy has also been designed to satisfy all the desired purposes. The main concept behind this topology is to provide high dv/dt regardless of the switching speed of a power switch and to control the current level to properly transfer adequate energy to various plasma applications.
引用
收藏
页码:1253 / +
页数:2
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