Laser deposition of shape-memory alloy for MEMS applications

被引：12
|
作者：
Camposeo, A
Puccini, N
Fuso, F
Allegrini, M
Arimondo, E
Tuissi, A
机构：
[1] Univ Pisa, Dipartimento Fis Enrico Fermi, INFM, I-56127 Pisa, Italy
[2] CNR, IENI, Sez Lecco, I-22053 Lecco, Italy
来源：
APPLIED SURFACE SCIENCE | 2003年 / 208卷
关键词：
PLD; shape-memory effect; MEMS; metal alloy films;
D O I：
10.1016/S0169-4332(02)01448-4
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码：518 / 521
页数：4
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