Micro-scale structure fabrication using micro-probe

被引：2
|
作者：
Shinya, N [1 ]
Konno, T [1 ]
Egashira, M [1 ]
机构：
[1] NATL RES INST MET,TSUKUBA,IBARAKI 305,JAPAN
来源：
SMART STRUCTURES AND MATERIALS 1996: SMART ELECTRONICS AND MEMS | 1996年 / 2722卷
关键词：
assembling; micro-probe; powder particles; manipulation; welding; micro-structures;
D O I：
10.1117/12.240457
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：36 / 44
页数：9
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