Micro-scale structure fabrication using micro-probe

被引：2
|
作者：
Shinya, N [1 ]
Konno, T [1 ]
Egashira, M [1 ]
机构：
[1] NATL RES INST MET,TSUKUBA,IBARAKI 305,JAPAN
来源：
SMART STRUCTURES AND MATERIALS 1996: SMART ELECTRONICS AND MEMS | 1996年 / 2722卷
关键词：
assembling; micro-probe; powder particles; manipulation; welding; micro-structures;
D O I：
10.1117/12.240457
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：36 / 44
页数：9
相关论文
共 50 条
  • [1] PIXE MICRO-PROBE ANALYSIS WITH THE HEIDELBERG PROTON MICRO-PROBE
    CHEN, JR
    KNEIS, H
    MARTIN, B
    NOBILING, R
    PELTE, D
    POVH, B
    TRAXEL, K
    NUCLEAR INSTRUMENTS & METHODS, 1981, 181 (1-3): : 141 - 148
  • [2] Fabrication of a silicon micro-probe for vertical probe card application
    Kim, YD
    Sim, JH
    Nam, JW
    Lee, JH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 7070 - 7073
  • [3] Chromosome structure at micro-scale
    Burgess, Darren J.
    NATURE REVIEWS GENETICS, 2020, 21 (06) : 337 - 337
  • [4] Chromosome structure at micro-scale
    Darren J. Burgess
    Nature Reviews Genetics, 2020, 21 : 337 - 337
  • [5] Micro-scale feature fabrication using immersed surface accumulation
    Li, Xiangjia
    Chen, Yong
    JOURNAL OF MANUFACTURING PROCESSES, 2017, 28 : 531 - 540
  • [6] Fabrication of dies in micro-scale for micro-sheet metal forming
    Fujimoto, Kinuko
    Yang, Ming
    Hotta, Masanao
    Koyama, Hiroshi
    Nakano, Shizuka
    Morikawa, Kazuo
    Cairney, Julie
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2006, 177 (1-3) : 639 - 643
  • [7] Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity
    Murayama, Y
    Omata, S
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 109 (03) : 202 - 207
  • [8] THE OXFORD PROTON MICRO-PROBE
    WATT, F
    GRIME, GW
    BLOWER, GD
    TAKACS, J
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (07): : 759 - 759
  • [9] DEVELOPMENT OF AN AUGER MICRO-PROBE
    DIENWIEBEL, I
    MIKROSKOPIE, 1980, 36 (9-10) : 313 - 313
  • [10] THE HEIDELBERG PROTON MICRO-PROBE
    KNEIS, H
    MARTIN, B
    NOBILING, R
    POVH, B
    TRAXEL, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01): : 79 - 83
12345