Evolution of element distribution at the interface of FTO/SiOxCy films with X-ray photoelectron spectroscopy

被引：2
|
作者：
Yang, J. K. [1 ]
Zhang, F. C. [1 ]
Chen, J. J. [1 ]
Yu, B. [1 ]
Gao, Y. [1 ]
Zhao, M. J. [1 ]
Liang, B. [1 ]
Zhao, H. L. [1 ]
机构：
[1] Yanshan Univ, Coll Mat Sci & Engn, State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Peoples R China
来源：
MATERIALS LETTERS | 2014年 / 133卷
基金：
中国国家自然科学基金;
关键词：
FTO/SiCxOy films; Element distribution; XPS; Interface; Diffusion; SNO2; THIN-FILMS; ELECTRICAL-PROPERTIES; OXIDE; SURFACE; CVD; PHOTOEMISSION; ADSORPTION; SUBSTRATE; FLUORINE; XPS;
D O I：
10.1016/j.matlet.2014.07.012
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
X-ray photoelectron spectroscopy was carried out to investigate the element distribution along the film depth, especially at the interface of FTO/SiOxCy films as-deposited and post-treated at 700 degrees C for 202 s and 262 s in the tempering furnace. The results show that the middle layer may effect a little on the conductivity, while an important diffusion layer exists between the functional layer and the barrier layer. It has been proved experimentally that the exacerbated diffusion at the interface layer makes the conductivity decreased. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：247 / 250
页数：4
相关论文
共 50 条
  • [1] X-ray photoelectron spectroscopy study of junction interface in In/BaRbBiO films
    Toda, F
    Yamada, T
    Kishida, S
    Tokutaka, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (5A): : 2482 - 2484
  • [2] X-ray photoelectron spectroscopy of thin films
    Nature Reviews Methods Primers, 3 (1):
  • [3] X-ray photoelectron spectroscopy of thin films
    Greczynski, Grzegorz
    Haasch, Richard T.
    Hellgren, Niklas
    Lewin, Erik
    Hultman, Lars
    NATURE REVIEWS METHODS PRIMERS, 2023, 3 (01):
  • [4] X-ray photoelectron spectroscopy of thin films
    Grzegorz Greczynski
    Richard T. Haasch
    Niklas Hellgren
    Erik Lewin
    Lars Hultman
    Nature Reviews Methods Primers, 3
  • [5] X-ray photoelectron spectroscopy of epitaxial films and heterostructures
    Chambers S.A.
    Surface Science Reports, 2024, 79 (03)
  • [6] Band alignment of TiO2/FTO interface determined by X-ray photoelectron spectroscopy: Effect of annealing
    Fan, Haibo
    Yang, Zhou
    Ren, Xianpei
    Yin, Mingli
    Gao, Fei
    Liu, Shengzhong
    AIP ADVANCES, 2016, 6 (01):
  • [7] X-ray photoelectron spectroscopy study of magnetic films
    Yu, GH
    Zhu, FW
    Chai, CL
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (01): : 45 - 47
  • [8] X-ray photoelectron spectroscopy study of magnetic films
    G.H. Yu
    F.W. Zhu
    C.L. Chai
    Applied Physics A, 2003, 76 : 45 - 47
  • [9] Thermally induced chemical evolution in polyimide films investigated by X-ray photoelectron spectroscopy
    Battirola, Liliane C.
    Rudolf, Petra
    Tremiliosi-Filho, Germano
    Rodrigues-Filho, Ubirajara P.
    POLYMER ENGINEERING AND SCIENCE, 2018, 58 (06): : 943 - 951
  • [10] A study of passive films using X-ray photoelectron and X-ray absorption spectroscopy
    Natishan, PM
    O'Grady, WE
    McCafferty, E
    Ramaker, DE
    Pandya, K
    Russell, A
    PROCEEDINGS OF THE SYMPOSIUM ON PASSIVITY AND ITS BREAKDOWN, 1998, 97 (26): : 701 - 711
12345