Plasma-treatment of MgO film in ac plasma display

被引：11
|
作者：
Lee, SH [1 ]
Rhee, BJ [1 ]
Joo, MH [1 ]
Kang, J [1 ]
Chung, JS [1 ]
Park, MH [1 ]
机构：
[1] LG Elect, Digital Display Res Lab, Seoul, South Korea
来源：
SURFACE & COATINGS TECHNOLOGY | 2003年 / 171卷 / 1-3期
关键词：
plasma-treatment; MgO; plasma display panels;
D O I：
10.1016/S0257-8972(03)00280-9
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We studied the influence of the plasma-treatment on MgO film in plasma display panels by XPS, SEM and AFM analysis. With the plasma-treatment, adsorbed contaminants on MgO surface were removed and the surface topography was changed smoothly. We observed that the breakdown and sustained voltages of plasma-treated panels are stabilized more rapidly than those of non-treated panels. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：247 / 251
页数：5
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