Measurements of the Ion-Beam Current Distribution over a Target Surface under a High Bias Potential

被引:5
|
作者
Mamedov, N. V. [1 ,2 ]
Prokhorovich, D. E. [1 ,2 ]
Yurkov, D. I. [1 ,2 ]
Kanshin, I. A. [1 ]
Solodovnikov, A. A. [1 ]
Kolodko, D. V. [2 ,3 ]
Sorokin, I. A. [2 ,3 ]
机构
[1] Dukhov All Russia Res Inst Automat, Moscow 127055, Russia
[2] MEPHI Natl Res Nucl Univ, Moscow 115409, Russia
[3] Russian Acad Sci, Fryazino Branch, Kotelnikov Inst Radio Engn & Elect, Fryazino 141190, Moscow Oblast, Russia
关键词
Compendex;
D O I
10.1134/S0020441218030223
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A technique for direct measurements of the current distribution over the surface of a target that is at a negative bias potential relative to the ground was developed and tested. Measurements were performed using a six-channel meter that transmitted the measured data through a wireless Bluetooth acquisition system. The trace of an ion flow on the target surface was visualized by the method of luminous beams. Examples of the measured current distributions on a target surface depending on the geometric and physical parameters of the ion-optical system of a Penning plasma source are presented.
引用
收藏
页码:530 / 537
页数:8
相关论文
共 50 条
  • [31] On the formation of the wavy microrelief on the surface of a semiconductor under actions of high current ion beam
    Grigor'ev, A.I.
    Shiryaeva, S.O.
    Belonozhko, D.F.
    Golovanov, A.S.
    Elektronnaya Obrabotka Materialov, 2000, (06): : 26 - 30
  • [32] CONTROL OF ION-BEAM CURRENT-DENSITY AND PROFILE FOR HIGH-CURRENT ION-IMPLANTATION SYSTEMS
    TANJYO, M
    FUJIWARA, S
    SAKAMOTO, H
    NAITO, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 86 - 89
  • [33] Exchange bias effects of NiFe/NiO bilayers through ion-beam bombardment on the NiO surface
    Li, Guijun
    Leung, Chi Wah
    Shueh, Chin
    Hsu, Hsun-Feng
    Huang, Hsuan-Rong
    Lin, Ko-Wei
    Lai, Pui To
    Pong, Philip W. T.
    SURFACE & COATINGS TECHNOLOGY, 2013, 228 : S437 - S441
  • [34] DENSITY, ELECTRON-TEMPERATURE AND SPACE POTENTIAL MEASUREMENTS USING AN ION-BEAM PROBE
    REINOVSK.RE
    JENNINGS, WC
    HICKOK, RL
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (02): : 161 - 161
  • [35] FOCUSED ION-BEAM INDUCED DEPOSITION IN THE HIGH-CURRENT DENSITY REGION
    TAKAHASHI, Y
    MADOKORO, Y
    ISHITANI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3233 - 3237
  • [36] HIGH-CURRENT ION-BEAM GENERATION IN FIELD-INSULATED ION DIODES AND TRIODES
    FLEISCHMANN, HH
    LUCKHARDT, SC
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (10): : 1380 - 1380
  • [37] A FOCUSED HE+ ION-BEAM WITH A HIGH ANGULAR CURRENT-DENSITY
    HIROSHIMA, H
    KOMURO, M
    KONISHI, M
    TSUMORI, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12B): : 4492 - 4495
  • [38] Emittance measurements of high-current pulse ion beam
    Ming, Jianchuan
    Yuan, Zhongxi
    Peng, Shixiang
    Song, Zhizhong
    Yu, Jinxiang
    Guo, Zhiyu
    Song, Xiangxiang
    Zou, Yubin
    Zhu, Kun
    He Jishu/Nuclear Techniques, 2006, 29 (02): : 105 - 107
  • [39] AN ION-BEAM SYSTEM FOR SPUTTERING OF METALS AN INSULATORS UNDER HIGH VACUUM CONDITIONS
    FIEDLER, O
    REISSE, G
    SCHONEIC.B
    WEISSMAN.C
    VACUUM, 1968, 18 (03) : 152 - &
  • [40] Measurements of the energy distribution of a high brightness rubidium ion beam
    ten Haaf, G.
    Wouters, S. H. W.
    Nijhof, D. F. J.
    Mutsaers, P. H. A.
    Vredenbregt, E. J. D.
    ULTRAMICROSCOPY, 2018, 190 : 12 - 20