Retardation modulated differential interference microscope and its application to 3-D shape measurement

被引：0
|
作者：
Ishiwata, H [1 ]
Itoh, M [1 ]
Yatagai, T [1 ]
机构：
[1] OLYMPUS OPT CO LTD,CORP RES DIV,HACHIOJI,TOKYO 192,JAPAN
来源：
INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY | 1996年 / 2873卷
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：21 / 24
页数：4
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