SiOx(C)/SiNx Dual-Layer Anti-Reflectance Coating For Improving Solar Cell Efficiency

The SiOx(C)/SiNx dual-layer shows a better antireflection coating compared with standard SiNx films, after deposition and annealing. In this paper, the effect of film thickness, sintering peak temperature, belt speed, etc. on the anti-reflectance of SiOx(C) film were discussed. Under optimized condition, the weighted reflectance of SiOx(C)/SiNx dual-layer obtained 1.25% reduction; the efficiency of solar cell rises 0.35%. Sixty solar cells with dual-layer encapsulated modules gained 0.5 W larger power as well as better light stability than the ones with SiNx single layer.